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Service for fine vacuum pumping systems

We offer maintenance, repair and exchange of wearing parts for rotary vane pumps of various manufacturers.

Fine Vacuum

Fine vacuum pumps generate  pressures (down to 1x10E-3 mbar) in the rough and fine vacuum range. A distinction is made between oil-sealed (e.g. rotary vane pumps) and oil-free fine vacuum pumps (e.g. diaphragm and scroll pumps).

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Oil-sealed fine vacuum pumps

Decontamination, repair and maintenance of rotary vane pumps, rotary piston pumps and piston pumps of various manufacturers, e.g.:

  • Leybold Vacuum (Trivac-Series, Sogevac-Series, E/DK-Series)
  • Pfeiffer Vacuum (Uno-Series, Duo-Series)
  • Adixen/Alcatel (Pascal-Series)
  • Edwards (RV-Series)
 -

Oil-free fine vacuum pumps

Decontamination, cleaning, maintenance and repair of scroll pumps, diaphragm pumps and roots pumps of various manufacturers, e.g.:

  • Pfeiffer Vacuum (WKP-series, UniDry-series, MVP-serie, MD-series, MZ-series)
  • Leybold Vacuum (WA/WAU-series, WS/WSU-series, SC-serie, Divac-series)
  • Adixen / Alcatel (RSV-series, ACP-series)
  • Varian (TriScroll-series, SH-series, IDP-series)
  • Edwards (ESDP-series, XDS-series)
  • Ulvac (DIS-series)
  • Anest Iwata (ISP-series)
  • Vacuubrand (all series)
  • KNF (Nxxx-series)
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On-site service

Decontamination, cleaning, maintenance and repair of scroll pumps, diaphragm pumps and roots pumps of various manufacturers.

Our services also include troubleshooting vacuum systems in production plants as well as inspecting plants and then recommending necessary service measures.

PRODUCT FINDER

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Service available

Service not available
Service Request
New service request for this product type
Second hand product
There are second hand products available for this product type
2021 SD HT A20
from Adixen
221SBTHZS-A, ...
Service Request
2033 C
from Alcatel
2033 SD
from Alcatel
2033C
from Alcatel
2063 H1
from Alcatel
2063 SD
from Alcatel
Agilent DS202
from Agilent
G 3850-802420
Service Request
Agilent DS42
from Agilent
X3700 60000
Service Request
DS42 220-240V
from Agilent
9499309M004
Service Request
Agilent MS40+
from Agilent
9499225M002
Service Request
AT-Duo 5 M 220-240/380-42...
from Pfeiffer Vacuum
PK D61 105 DA
Service Request
Busch R5
from Busch
R5RA0255D503CWXX, ...
Service Request
TRIVAC D 16 B
from Leybold Vacuum
Drehschieberpumpe
from Leybold Vacuum
DS 102
from Varian
9499515, ...
Service Request
DS 302
from Varian
902-9325 8006, ...
Service Request
DS 402
from Agilent
9499330M008, ...
Service Request
DS 602
from Varian
949-9335S001, ...
Service Request
DS402
from Agilent
949-9330M005, ...
Service Request
DUO 1,3
from Pfeiffer Vacuum
PK D41 073 C
Service Request
DUO 1.6
from Pfeiffer Vacuum
PK D56 510, ...
Service Request
DUO 1.6 M
from Pfeiffer Vacuum
PK D56 112 B
Service Request
Duo 1.6 M, single-phase m...
from Pfeiffer Vacuum
PK D56 102 C
Service Request
Duo 1.6 M, single-phase m...
from Pfeiffer Vacuum
PK D56 107 C
Service Request
Duo 1.6 M, single-phase m...
from Pfeiffer Vacuum
PK D56 112 C
Service Request
Duo 1.6, single-phase mot...
from Pfeiffer Vacuum
PK D56 702 C
Service Request
Duo 1.6, single-phase mot...
from Pfeiffer Vacuum
PK D56 707 C
Service Request
Duo 1.6, single-phase mot...
from Pfeiffer Vacuum
PK D56 712 C
Service Request
DUO 10
from Pfeiffer Vacuum
PK D62 105 B, ...
Service Request
Duo 10 C
from Pfeiffer Vacuum
PK D62 732 D
Service Request
DUO 10 M
from Pfeiffer Vacuum
PK D62 105 C, ...
Service Request
Duo 10 M
from Pfeiffer Vacuum
PK D62 105 D
Service Request
Duo 10 M, single-phase mo...
from Pfeiffer Vacuum
PK D62 707 F
Service Request
Duo 10 M, single-phase mo...
from Pfeiffer Vacuum
PK D62 712 F
Service Request
Duo 10 M, three-phase mot...
from Pfeiffer Vacuum
PK D62 105 F
Service Request
DUO 10 M; F4 Öl
from Pfeiffer Vacuum
PK D62 045 D
Service Request
Duo 10 MC, single-phase m...
from Pfeiffer Vacuum
PK D62 727 F
Service Request
Duo 10 MC, single-phase m...
from Pfeiffer Vacuum
PK D62 732 F
Service Request
DUO 10M
from Pfeiffer Vacuum
DUO 11
from Pfeiffer Vacuum
PK D59 712, ...
Service Request
Duo 11 , 3-phase Motor,...
from Pfeiffer Vacuum
PK D59 602 C
Service Request
DUO 11 ATEX
from Pfeiffer Vacuum
PK D59 905C
Service Request
Duo 11 M, single-phase mo...
from Pfeiffer Vacuum
PK D59 107 C
Service Request
Duo 11 M, single-phase mo...
from Pfeiffer Vacuum
PK D59 110 C
Service Request
Duo 11 M, single-phase mo...
from Pfeiffer Vacuum
PK D59 111 C
Service Request
Duo 11 M, single-phase mo...
from Pfeiffer Vacuum
PK D59 112 C
Service Request
Duo 11 M, 3-phase, 230/...
from Pfeiffer Vacuum
PK D59 152 C
Service Request
Duo 11 MC, single-phase m...
from Pfeiffer Vacuum
PK D59 211 C
Service Request
Duo 11 MC, single-phase m...
from Pfeiffer Vacuum
PK D59 212 C
Service Request
Duo 11, single-phase moto...
from Pfeiffer Vacuum
PK D59 712 C
Service Request
DUO 120
from Pfeiffer Vacuum
PK D26 602 B
Service Request
DUO 120 A
from Pfeiffer Vacuum
PK D26 602, ...
Service Request
DUO 125
from Pfeiffer Vacuum
PK D47 602, ...
Service Request
Duo 125, three-phase moto...
from Pfeiffer Vacuum
PK D47 602 C
Service Request
DUO 2,5
from Pfeiffer Vacuum
PK D41 064 E, ...
Service Request
DUO 2,5 A
from Pfeiffer Vacuum
PK D41 055 C, ...
Service Request
DUO 2.5
from Pfeiffer Vacuum
PK D41 050 CA, ...
Service Request
DUO 2.5C
from Pfeiffer Vacuum
PK D41 014 C
Service Request
DUO 20
from Pfeiffer Vacuum
PK D63 026 A, ...
Service Request
DUO 20 M
from Pfeiffer Vacuum
PK D63 105 BA, ...
Service Request
Duo 20 M, 1-phase motor, ...
from Pfeiffer Vacuum
PK D63 707 E
Service Request
Duo 20 M, 1-phase motor, ...
from Pfeiffer Vacuum
PK D63 712 E
Service Request
Duo 20 M, 3-phase motor, ...
from Pfeiffer Vacuum
PK D63 105 E
Service Request
DUO 20 MC
from Pfeiffer Vacuum
Duo 20 MC F4 Öl
from Pfeiffer Vacuum
PK D63 732 D
Service Request
Duo 20 MC, 1-phase motor,...
from Pfeiffer Vacuum
PK D63 727 E
Service Request
Duo 20 MC, 1-phase motor,...
from Pfeiffer Vacuum
PK D63 732 E
Service Request
Duo 20 MC, 3-phase motor,...
from Pfeiffer Vacuum
PK D63 135 E
Service Request
DUO 20 MC, F4 Öl, mit Ö...
from Pfeiffer Vacuum
PK D63 028 A
Service Request
DUO 20 MC; F4 Öl
from Pfeiffer Vacuum
PK D63 732 B
Service Request
DUO 20M
from Pfeiffer Vacuum
PK D63 715 D
Service Request
DUO 250
from Pfeiffer Vacuum
PK D27 930-A
Service Request
DUO 3
from Pfeiffer Vacuum
PK D57 712A, ...
Service Request
Duo 3
from Pfeiffer Vacuum
PK D57 505A, ...
Service Request
Duo 3 115/230V 50/60 HZ P...
from Pfeiffer Vacuum
PK 195 281 -T
Service Request
DUO 3 M
from Pfeiffer Vacuum
PK D57 107, ...
Service Request
Duo 3 M
from Pfeiffer Vacuum
PK D57 107 C
Service Request
DUO 3 M - 115/230 V
from Pfeiffer Vacuum
PK D57 111 B, ...
Service Request
Duo 3 M 115/230 V
from Pfeiffer Vacuum
PK D571 010 C
Service Request
DUO 35
from Pfeiffer Vacuum
PK D45 602, ...
Service Request
DUO 35 C
from Pfeiffer Vacuum
DUO 35 M
from Pfeiffer Vacuum
PK D45 028 B, ...
Service Request
Duo 35 M, 3-phase motor, ...
from Pfeiffer Vacuum
PK D45 028 E
Service Request
DUO 35 MC
from Pfeiffer Vacuum
PK D45 027 B
Service Request
Duo 35, 3-phase motor, 3T...
from Pfeiffer Vacuum
PK D45 602 E
Service Request
DUO 5
from Pfeiffer Vacuum
PK D61 105 A, ...
Service Request
Duo 5 M
from Pfeiffer Vacuum
PK D61 712, ...
Service Request
DUO 5 M
from Pfeiffer Vacuum
PK D61 029 B
Service Request
Duo 5 M, 1-phase motor, 2...
from Pfeiffer Vacuum
PK D61 712 D
Service Request
DUO 5 MC, F4 Öl
from Pfeiffer Vacuum
PK D61 125 B
Service Request
DUO 5M
from Pfeiffer Vacuum
DUO 6
from Pfeiffer Vacuum
PK D58 712, ...
Service Request
Duo 6
from Pfeiffer Vacuum
PK D58 505 C
Service Request
DUO 6 M
from Pfeiffer Vacuum
PK D58 111 A
Service Request
Duo 6 M
from Pfeiffer Vacuum
PK D58 111 C
Service Request
DUO 6 M , Rotary vane pum...
from Pfeiffer Vacuum
PK 195 489 -T
Service Request
Duo 6 m C
from Pfeiffer Vacuum
PK D58 211 C
Service Request
Duo 6 M, Rotary vane pu...
from Pfeiffer Vacuum
PK D58 152 C
Service Request
DUO 6, Rotary vane pump
from Pfeiffer Vacuum
Duo 65
from Pfeiffer Vacuum
PK D46 016 A, ...
Service Request
DUO 65
from Pfeiffer Vacuum
PK D46 602 EA, ...
Service Request
DUO 65 C
from Pfeiffer Vacuum
PK D46 202 A
Service Request
DUO 65 M
from Pfeiffer Vacuum
PK D46 013, ...
Service Request
Duo 65 M
from Pfeiffer Vacuum
PK D46 013 A
Service Request
Duo 65 M, 3-phase motor, ...
from Pfeiffer Vacuum
PK D46 035 E
Service Request
DUO 65 MC
from Pfeiffer Vacuum
PK D46 036 C
Service Request
Duo 65 MC, 3-phase motor,...
from Pfeiffer Vacuum
PK D46 036 E
Service Request
DUO 65C
from Pfeiffer Vacuum
PK D45 202 A
Service Request
Duo 6M
from Pfeiffer Vacuum
PK D58 112 C
Service Request
DUO 6M
from Pfeiffer Vacuum
PK D58 109 C, ...
Service Request
Duo125
from Pfeiffer Vacuum
PK D47 162B
Service Request
DUO3
from Pfeiffer Vacuum
E2M80 PFPE
from Edwards
A365-11-000
Service Request
EcoDry M20
from Leybold Vacuum
Edwards RV3
from Edwards
042-00146-03
Service Request
Exchange Pascal 2010 SD
from Pfeiffer Vacuum
210SEYHZS -A, ...
Service Request
GLD-051
from Ulvac
GVD 12
from Atlas Copco
A655-25-903
Service Request
Hena 200
from Pfeiffer Vacuum
Hena 25
from Pfeiffer Vacuum
PK D02 212, ...
Service Request
Hena 300
from Pfeiffer Vacuum
PK D02 461, ...
Service Request
Hena 301
from Pfeiffer Vacuum
PK D03 450 A, ...
Service Request
Hena 301 S
from Pfeiffer Vacuum
PK D03 453 A
Service Request
Hena 40
from Pfeiffer Vacuum
PK D02 283, ...
Service Request
Hena 41
from Pfeiffer Vacuum
PK D03 250 A
Service Request
Hena 60
from Pfeiffer Vacuum
PK D02 300 A
Service Request
Hena 60 i
from Pfeiffer Vacuum
Hena 630
from Pfeiffer Vacuum
HS 602
from Agilent
7499365R002
Service Request
MINK MI 2122 B V01
from Busch
MINK MI 2122 B V01
Service Request
MS40
from Agilent
G1960-80040
Service Request
Pascal 1015i
from Pfeiffer Vacuum
115SFYHLS -A
Service Request
RVP 1015i
from Pfeiffer Vacuum
115SFYHZS -A
Service Request
RVP UM 1015 I HV
from Pfeiffer Vacuum
PASCAL 2005
from Adixen
Pascal 2005 SD
from Adixen
205SDSLAM, ...
Service Request
Vakuumpumpe
from Pfeiffer Vacuum
205AESDTHEM
Service Request
Pascal 2015 SD
from Alcatel
2015SD, ...
Service Request
Pascal 2015,
from Adixen
RVP 2015SD
from Adixen
PASCAL 2063
from Adixen
PASCAL 2063
Service Request
Pascal 2063SD
from Adixen
263SDT1HWMNX
Service Request
RA1600B
from Busch
RV 12
from Edwards
A655-01-906
Service Request
RV 3
from Edwards
A652-01-904, ...
Service Request
RV 8
from Edwards
A654-01-905
Service Request
RV12
from Edwards
A655-01-903R, ...
Service Request
RV3
from Edwards
A652-01-903, ...
Service Request
RV8
from Edwards
A654-01-903
Service Request
RZ 2.5
from Vacuubrand
RZ2.5
from Vacuubrand
SmartVane 55
from Pfeiffer Vacuum
SmartVane 70
from Pfeiffer Vacuum
SOGEVAC SV 100
from Leybold Vacuum
109109900002
Service Request
SOGEVAC SV 100 B
from Leybold Vacuum
SOGEVAC SV 1200
from Leybold Vacuum
1097099/35, ...
Service Request
SOGEVAC SV 16 B
from Leybold Vacuum
SOGEVAC SV 200
from Leybold Vacuum
300011604679, ...
Service Request
SV 200
from Leybold Vacuum
SOGEVAC SV 25
from Leybold Vacuum
SOGEVAC SV 25 B
from Leybold Vacuum
SOGEVAC SV 300
from Leybold Vacuum
1093138, ...
Service Request
SOGEVAC SV 300 B
from Leybold Vacuum
SOGEVAC SV 40 B
from Leybold Vacuum
960302, ...
Service Request
SOGEVAC SV 40 BI
from Leybold Vacuum
SV40BI
from Leybold Vacuum
SOGEVAC SV 500
from Leybold Vacuum
SOGEVAC SV 630
from Leybold Vacuum
SOGEVAC SV 630 B
from Leybold Vacuum
960867V3005, ...
Service Request
SOGEVAC SV 630 F
from Leybold Vacuum
956639900008, ...
Service Request
SOGEVAC SV 630B
from Leybold Vacuum
960867V2023
Service Request
SOGEVAC SV 65
from Leybold Vacuum
SOGEVAC SV 65 B
from Leybold Vacuum
960400V3002
Service Request
SOGEVAC SV 65 BIFC
from Leybold Vacuum
960463V3001
Service Request
SOGEVAC SV 65B
from Leybold Vacuum
SOGEVAC SV100
from Leybold Vacuum
SOGEVAC SV100 B
from Leybold Vacuum
960507V3007, ...
Service Request
SOGEVAC SV16B
from Leybold Vacuum
960160V3003
Service Request
SOGEVAC SV25
from Leybold Vacuum
9550363, ...
Service Request
SOGEVAC SV300
from Leybold Vacuum
109319900041
Service Request
SV 300
from Leybold Vacuum
SOGEVAC SV300 B
from Leybold Vacuum
960702V2022, ...
Service Request
SOGEVAC SV40 BI
from Leybold Vacuum
960331V3005
Service Request
SOGEVAC SV40 BIFC
from Leybold Vacuum
SV65BIFC
from Leybold Vacuum
960465V013001
Service Request
SV65 BIFC
from Leybold Vacuum
950465V013001
Service Request
SOGEVAC SV65B
from Leybold Vacuum
SOGEVAC SV65BIFC
from Leybold Vacuum
960465V3001, ...
Service Request
SV 120 B
from Leybold Vacuum
950555-20V3001, ...
Service Request
SV 40 B
from Leybold Vacuum
T 2100 SD
from Alcatel
TRIVAC 2,5
from Leybold Vacuum
TRIVAC D 40 BCS
from Leybold Vacuum
TRIVAC D16 BCS
from Leybold Vacuum
TRIVAC D16B
from Leybold Vacuum
Trivac D16B
from Leybold Vacuum
TRIVAC D2.5E
from Leybold Vacuum
TRIVAC D25B
from Leybold Vacuum
TRIVAC D25BCS
from Leybold Vacuum
720-75-005, ...
Service Request
TRIVAC D25BCS-PFPE
from Leybold Vacuum
TRIVAC D65B
from Leybold Vacuum
Trivac D65BCS-PFPE
from Leybold Vacuum
TRIVAC D8B
from Leybold Vacuum
Trivac S16B
from Leybold Vacuum
1026501, ...
Service Request
TRIVAC TI 16B
from Leybold Vacuum
Ulvac VD40C
from Ulvac
UMO 6
from Pfeiffer Vacuum
PK D07 502 AA
Service Request
UV 16
from Pneumofore
VD40C
from Ulvac