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Decontamination
of vacuum components
Maximum safety
All necessary decontamination processes are carried out under special safety precautions.
Copper Segregation / Cu-segregation
The decontamination of copper-contaminated components is performed in a fully segregated area.
Maximum safety
All necessary processes during a decontamination are carried out under special safety precautions.
- Full protection suits for single use
- External fresh air supply
- Special air filter systems
- certified according to KrW-/AbfG
Copper Segregation / Cu-segregation
Especially in the semiconductor industry, vacuum components are used in copper-process. A mixing of components from copper- and non-copper-processes can lead to cross-contamination. This can have negative effects on processes. To prevent this, components originating from copper-processes must be treated separatly.
DREEBIT provides a fully segregated decontamination line for Cu-contaminated components and vacuum pumps.
Declaration of contamination
In the interest of protecting the health of our employees, please note that the repair and service of vacuum equipment and components will only be started if a correctly completed declaration of contamination has been submitted.
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