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Decontamination of Vacuum Components
following the latest standards and certified according to KrW-/AbfG
DECONTAMINATION
A wide range of vacuum processes comprise toxic compounds or result in hazardous reaction products. Vacuum
components that are used in such processes have to be decontaminated before any repair or maintenance action to
to protect the health of our employees. DREEBIT provides a certificated decontamination line in accordance with
the latest standards.
Please use our request / RMA form to send in vacuum devices. We will then contact you and provide you with all
the documents you need to send in your device.
Maximum safety
All necessary processes during a decontamination are carried out under special safety precautions.
- Full protection suits for single use
- External fresh air supply
- Special air filter systems
- certified according to KrW-/AbfG
Copper Segregation / Cu-segregation
Especially in the semiconductor industry, vacuum components are used in copper-process. A mixing of components from copper- and non-copper-processes can lead to cross-contamination. This can have negative effects on processes. To prevent this, components originating from copper-processes must be treated separatly.
DREEBIT provides a fully segregated decontamination line for Cu-contaminated components and vacuum pumps.