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Decontamination of Vacuum Components

following the latest standards and certified according to KrW-/AbfG

DECONTAMINATION

A wide range of vacuum processes comprise toxic compounds or result in hazardous reaction products. Vacuum components that are used in such processes have to be decontaminated before any repair or maintenance action to to protect the health of our employees. DREEBIT provides a certificated decontamination line in accordance with the latest standards.
Please use our request / RMA form to send in vacuum devices. We will then contact you and provide you with all the documents you need to send in your device.
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Maximum safety

All necessary processes during a decontamination are carried out under special safety precautions.

  • Full protection suits for single use
  • External fresh air supply
  • Special air filter systems
  • certified according to KrW-/AbfG
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Copper Segregation / Cu-segregation

Especially in the semiconductor industry, vacuum components are used in copper-process. A mixing of components from copper- and non-copper-processes can lead to cross-contamination. This can have negative effects on processes. To prevent this, components originating from copper-processes must be treated separatly.

DREEBIT provides a fully segregated decontamination line for Cu-contaminated components and vacuum pumps.